Hui Lin
材料科学技术（英）
Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low
temperature by DC magnetron sputtering from an In-Sn (90{10 wt pct) alloy target were studied. The correla-
tion between deposition conditions and ITO property was systematically investigated and characterized. These
as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs).
The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed
a maximum luminance of 2125 cd/m2 at 13 V.
关键词:
Flexible Organic light-emitting diodes
,
Indium tin oxide
,
DC sputtering
